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Corrosion performance and detection analysis of cutting disc

Corrosion performance and detection analysis of cutting disc

Submitted by • January 15, 2019 www.auroraabrasive.com

Cutting disc corrosion A/B: After being machined by slicing and grinding, the damaged layer formed by the processing stress on the surface of the wafer is usually removed by chemical etching. Corrosion A is acid corrosion. The damaged layer is removed by mixed acid solution to produce hydrogen fluoride, NOX and waste mixed acid; corrosion B is alkaline corrosion, and the damaged layer is removed with sodium hydroxide solution to produce waste alkali liquor. Some of the silicon wafers in this project use corrosion A and some use corrosion B.
Cutting plate binning monitoring: damage detection of the silicon wafer, and the damaged silicon wafer is re-corroded.
Rough cutting disc: use a single abrasive to remove the damaged layer, generally removing 10~20um. Here, a rough throw waste liquid is produced.
Fine cutting disc: The use of fine grinding agent to improve the micro-roughness of the surface of the silicon wafer, generally less than 1 um, thus to a high flatness wafer. Produce fine

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